Patent · US Active

Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles

US7665416B2 · kind B2 · utility

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28Claims

0Family size

Assignee

R3T GmbH Rapid Reactive Radicals Technology · DE

Inventors

Alexander Gschwandtner · Hersbruck, DE
Josef Mathuni · Munich, DE
Alexander Mattheus · Taufkirchen, DE
Stephan Schneider · Amberg, DE
Jürgen Sellmaier · Munich, DE
Heinz Steinhardt · Kottingbrunn, AT

Key dates

Filing date	Jun 12, 2006
Grant date	Feb 23, 2010
Priority date	—
Expiry date	Sep 11, 2026

Classification

Technology area (CPC H)Electricity
CPC primaryH05H1/30
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus is described for generating excited and/or ionized particles in a plasma with a generator for generating an electromagnetic wave and an excitation chamber with a plasma zone in which the excited and/or ionized particles are formed. At least one excitation chamber is arranged in an insulating material off-center relative to a ring-cylindrical outer conductor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.