Antireflective coating compositions
US7666575B2 · kind B2 · utility
1Cited by
16References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2006 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Jan 30, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/952
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to an antireflective coating composition comprising, (i) a thermal acid generator; (ii) a crosslinkable polymer comprising at least one aromatic group; and, (iii) a polymeric crosslinker comprising at least one unit of structure (6),where R11 to R13 is independently selected from H, (C1-C6) alkyl and aromatic group, R14 and R15 are independently (C1-C10) alkyl. The invention also relates to a process for imaging the antireflective coating composition of the present invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.