Substrate patterning for multi-gate transistors
US7666796B2 · kind B2 · utility
1Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2006 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Aug 10, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/024
Abstract
Some embodiments of the present invention include apparatuses and methods relating to improved substrate patterning for multi-gate transistors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.