Support ring assembly
US7670436B2 · kind B2 · utility
16Cited by
162References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2004 |
| Grant date | Mar 2, 2010 |
| Priority date | — |
| Expiry date | Nov 20, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S156/915
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate ring assembly is provided for a substrate support having a peripheral edge. The assembly has an annular band having an inner perimeter that surrounds and at least partially covers the peripheral edge of the substrate support. The assembly also has a clamp to secure the annular band to the peripheral edge of the substrate support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.