Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement
US7673645B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 20, 2007 |
| Grant date | Mar 9, 2010 |
| Priority date | — |
| Expiry date | Apr 22, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87772
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The multiple antisymmetric optimal (MAO) control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into multiple flow lines. In the MAO control algorithm, each flow line is provided with a flow sensor and a valve actively controlled by a SISO feedback controller combined with a linear saturator to achieve the targeted flow ratio set point. For optimal control performance, these SISO controller and linear saturators are substantial identical. It is proved that each valve control command is multiple antisymmetric to the summation of all other valve control commands. Therefore, the MAO control algorithm guarantees that there exists at least one valve at the allowable maximum open position at any moment, which achieves the optimal solution in terms of the maximum total valve conductance for a given set of flow ratio set points.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.