Producing thin integrated semiconductor devices
US7674654B2 · kind B2 · utility
5Cited by
3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2007 |
| Grant date | Mar 9, 2010 |
| Priority date | — |
| Expiry date | Feb 13, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Thin integrated semiconductor devices are produced by being embedded in a molding compound matrix in such a way that a composite is formed. The semiconductor devices are first embedded in the matrix and then thinned after being embedded. The thin integrated semiconductor devices are singulated by forming separating cuts into the molding compound matrix between adjacent devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.