Wafer container and door with vibration dampening latching mechanism
US7677393B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2007 |
| Grant date | Mar 16, 2010 |
| Priority date | — |
| Expiry date | Nov 13, 2027 |
Classification
- Technology area (CPC E)Fixed Constructions
- CPC primaryE05C9/042
- WIPO fieldCivil engineering
- WIPO sectorOther fields
Abstract
A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.