Patent · US Active

Semiconductor device with gel-type thermal interface material

US7678615B2 · kind B2 · utility

9Cited by
9References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 29, 2007
Grant dateMar 16, 2010
Priority date
Expiry dateFeb 28, 2028

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3511
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Various methods and apparatus for establishing a thermal pathway for a semiconductor device are disclosed. In one aspect, a method of manufacturing is provided that includes forming a metal layer on a semiconductor chip and forming a gel-type thermal interface material layer on the metal layer. A solvent and a catalyst material are applied to the metal layer prior to forming the gel-type thermal interface material layer to facilitate bonding between the gel-type thermal interface material layer and the metal layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.