Patent · US Active

Scanning microscopy

US7684048B2 · kind B2 · utility

6Cited by

14References

14Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Doron Meshulach · Ramat Gan, IL
Haim Feldman · Yafia, IL

Key dates

Filing date	Nov 14, 2006
Grant date	Mar 23, 2010
Priority date	—
Expiry date	May 4, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/4792
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Apparatus for imaging a surface, including scanning optics, which are configured to scan and focus one or more traveling beams onto the surface so as to form one or more traveling spots thereon. The apparatus also includes collection optics, which are arranged to collect radiation scattered from the one or more traveling spots and to focus the radiation to form one or more image spots traveling along a line. The apparatus also has a detecting assembly, which consists of a detector which is configured to generate a signal in response to the one or more traveling image spots, and a detector entry port interposed between the collection optics and the detector, which is coincident with the line. The apparatus also includes phase and/or polarization altering elements for the traveling beams.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.