Micro force measurement device, micro force measurement method, and micro surface shape measurement probe
US7685733B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2006 |
| Grant date | Mar 30, 2010 |
| Priority date | — |
| Expiry date | Sep 21, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is disclosed a micro surface shape measurement probe including a probe shaft 4 having at a distant end thereof a probe member 2 for contacting an object 1 to be measured, a probe body 21 provided with support means for movably supporting the probe shaft 4 in a non-contact manner, a pressing device for pressing and moving the probe shaft 4 toward the object 1 to be measured, a piezoelectric sensor 8a incorporated in the probe body 21 so that a reactive force acts to a pressing force applied to the probe shaft by the pressing device, a load detecting device 8b to measure a load acting on the piezoelectric sensor, a control device 9 for adjusting the pressing force applied by the pressing device based on the load detected by the load detecting device, and a displacement amount measuring device for measuring a position of the probe member 2 in contact with the object 1 to be measured by the pressing force adjusted by the control device 9.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.