Patent · US Active

Optical coatings

US7687225B2 · kind B2 · utility

0Cited by

29References

19Claims

0Family size

Assignee

Intel Corporation · US

Inventors

Sergei Koveshnikov · Boise, US
Juan E. Dominguez · Portland, US
Kyle Flanigan · Portland, US
Ernisse Putna · Beaverton, US

Key dates

Filing date	Sep 29, 2004
Grant date	Mar 30, 2010
Priority date	—
Expiry date	Jan 23, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S438/964
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Systems and techniques involving optical coatings for semiconductor devices. An implementation includes a substantially isotropic, heterogeneous anti-reflective coating having a substantially equal thickness normal to any portion of a substrate independent of the orientation of the portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.