Storage capacitor, a memory device and a method of manufacturing the same

US7687343B2 · kind B2 · utility

Assignee

• Qimonda AG · DE

Inventors

• Peter Moll · Dresden, DE
• Peter Baars · Dresden, DE
• Till Schloesser · Dresden, DE
• Rolf Weis · Dresden, DE
• Klaus Muemmler · Dresden, DE

Key dates

• Filing date: Dec 4, 2006
• Grant date: Mar 30, 2010
• Expiry date: Dec 13, 2027

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10B12/50

Abstract

A storage capacitor includes a first capacitor portion and a second capacitor portion, the second capacitor portion being disposed above the first capacitor portion, thereby defining a first direction. The first and the second portions each include a hollow body made of a conductive material, respectively, thereby forming a first capacitor electrode. An upper diameter of each of the hollow bodies is larger than a lower diameter of the hollow body, the diameter being measured perpendicularly with respect to the first direction. The storage capacitor also includes a second capacitor electrode and a dielectric material disposed between the first and the second capacitor electrodes. The storage capacitor also includes an insulating material disposed outside the hollow bodies, and a layer of an insulating material. A lower side of the insulating layer is disposed at a height of an upper side of the first capacitor portion.