Component containing a baw filter
US7687833B2 · kind B2 · utility
7Cited by
4References
16Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 29, 2007 |
| Grant date | Mar 30, 2010 |
| Priority date | — |
| Expiry date | Mar 27, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/0547
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A monolithic assembly of electronic components including a semiconductor substrate, at a first level above the substrate, at least one bulk acoustic wave resonator, at a second level above the resonator, a single-crystal semiconductor layer in which are formed semiconductor components, and recesses under the semiconductor layer portions arranged above the resonators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.