Lithographic apparatus with rotation filter device
US7700930B2 · kind B2 · utility
1Cited by
1References
22Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 14, 2007 |
| Grant date | Apr 20, 2010 |
| Priority date | — |
| Expiry date | Jun 17, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/5268
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A lithographic apparatus including a filter device is disclosed. The filter device has a plurality of foils attached to a holder which is able to rotate around a rotation axis. The foils are arranged substantially parallel to the rotation axis. The foils comprise a uni-directional carbon-fiber composite material selected from the group consisting of carbon-carbon composite (C-C composite) and carbon-silicon carbide composite (C—SiC composite). During operation, the filter device rotates and filters out debris from a radiation source, such as a Sn plasma source. Such a filter device per se may be provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.