Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector
US7705301B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2007 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Mar 29, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2449
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electron beam apparatus and method are presented for collecting side-view and plane-view SEM imagery. The electron beam apparatus includes an electron source, some intermediate lenses if needed, an objective lens and an in-lens sectional detector. The electron source will provide an electron beam. The intermediate lenses focus the electron beam further. The objective lens is a combination of an immersion magnetic lens and a retarding electrostatic lens focuses the electron beam onto the specimen surface. The in-lens detector will be divided into two or more sections to collect secondary electrons emanating from the specimen with different azimuth and polar angle so that side-view SEM imagery can be obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.