Inventor · Beijing, CN

Zhong-Wei Chen

53Patents
10h-index
54Co-inventors
81Inventor score

Filing activity: Jan 11, 1995 → Sep 28, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US5578821A Electron beam inspection system and method Electricity 268 Expired
US5717204A Inspecting optical masks with electron beam microscopy Electricity 95 Expired
US7105436B2 Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Electricity 83 Expired
US5665968A Inspecting optical masks with electron beam microscopy Electricity 72 Expired
US6392231B1 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method Electricity 33 Expired
US7872236B2 Charged particle detection devices Electricity 18 Active
US7705301B2 Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector Electricity 13 Active
US7759653B2 Electron beam apparatus Electricity 11 Active
US8752030B1 Process abstraction and tracking, systems and methods Physics 11 Active
US7705298B2 System and method to determine focus parameters during an electron beam inspection Electricity 10 Active
US6960766B2 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method Electricity 9 Expired
US7893406B1 Electron gun with magnetic immersion double condenser lenses Electricity 8 Active
US6605805B2 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method Electricity 8 Expired
US6710342B1 Method and apparatus for scanning semiconductor wafers using a scanning electron microscope Electricity 7 Expired
US7928383B2 Charged particle system including segmented detection elements Electricity 4 Active
US7335879B2 System and method for sample charge control Electricity 4 Active
US7474001B2 Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Electricity 4 Active
US8218284B2 Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam Emerging Cross-Sectional Technologies 3 Active
US10892138B2 Multi-beam inspection apparatus with improved detection performance of signal electrons Electricity 2 Active
US8314401B2 Electron gun with magnetic immersion double condenser lenses Electricity 2 Active
US11289304B2 Apparatus using multiple beams of charged particles Electricity 2 Active
US8229114B2 Identity-based key generating methods and devices Electricity 2 Active
US11222766B2 Multi-cell detector for charged particles Electricity 2 Active
US11676793B2 Apparatus of plural charged particle beams Electricity 1 Active
US11282675B2 Multi-beam inspection apparatus with improved detection performance of signal electrons Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.