Methods and systems for providing illumination of a specimen for a process performed on the specimen
US7705331B1 · kind B1 · utility
80Cited by
11References
116Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2007 |
| Grant date | Apr 27, 2010 |
| Priority date | — |
| Expiry date | Oct 14, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.