ESD protection device and method

US7709896B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Cornelius Christian Russ · Diedorf, DE
• David Alvarez · Saint Johnsbury Center, US
• Kiran V. Chatty · Williston, US
• Jens Schneider · Bielefeld, DE
• Robert J. Gauthier, JR. · Williston, US
• Martin Wendel · Höhenkirchen-Siegertsbrunn, DE

Key dates

• Filing date: Mar 8, 2006
• Grant date: May 4, 2010
• Expiry date: Sep 30, 2027

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/62

Abstract

An ESD protection device includes a source region, a channel region adjacent the source region, and an elongated drain region spaced from the source region by the channel region. The elongated drain region includes an unsilicided portion adjacent the channel and a silicided portion spaced from channel region by the unsilicided portion. A first ESD region is located beneath the silicided portion of the elongated drain region and a second ESD region is located beneath the unsilicided portion of the elongated drain region, the second ESD region being spaced from the first ESD region.