Method for manufacturing an integrated circuit including a transistor
US7718475B2 · kind B2 · utility
3Cited by
0References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2007 |
| Grant date | May 18, 2010 |
| Priority date | — |
| Expiry date | Feb 21, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/664
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a transistor comprising a gate channel area and a gate stack having mechanical stress arranged on the gate channel area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.