Method and structure for creation of a metal insulator metal capacitor
US7728372B2 · kind B2 · utility
3Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2006 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | Jun 14, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/692
Abstract
The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protective layer on an insulator which is on a conductive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.