Monolithic stage devices providing motion in six degrees of freedom
US7728462B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 2007 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | May 21, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Stage devices for various uses including use as a reticle stage or substrate stage in a microlithography system. An exemplary device includes a carrier and multiple linear EM actuators that couple the carrier monolithically to a base. The linear EM actuators collectively provide controlled movability of the carrier relative to the base in all six DOFs (X, Y, Z, θX, θY, θZ). The multiple linear EM actuators comprise at least one multiple-DOF linear actuator but fewer than six linear EM actuators. For example, the stage device can have two two-DOF linear actuators providing respective motions of the carrier in the X, Y and Y, Z DOFs (and collectively in all six DOFs) or can have two two-DOE linear actuators providing motions of the carrier in the Y, Z, θX, θY, and θZ DOFs and a one-DOF linear actuator providing motions in the X DOF.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.