Method and system for determining condition of process performed for coating film before immersion light exposure
US7733472B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 1, 2007 |
| Grant date | Jun 8, 2010 |
| Priority date | — |
| Expiry date | Aug 27, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/16
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method is used for determining a condition of a predetermined process for preparing a process target, which includes a coating film formed on a substrate and including a resist film. This is to prevent film peeling from occurring in the coating film when performing immersion light exposure after the predetermined process. The method includes preparing test targets, each of which includes a sample film corresponding to the coating film and formed on a sample substrate corresponding to the substrate; performing a test process on each of the test targets in a testing unit, which imitates an immersion light exposure apparatus, under a condition corresponding to a designated immersion light exposure condition; and determining a condition of the predetermined process to be used for the coating film, based on a result of the test process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.