Patent · US Active

Carrier head using flexure restraints for retaining ring alignment

US7749052B2 · kind B2 · utility

5Cited by

5References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Jin Yi · Sunnyvale, US
Jeonghoon Oh · San Jose, US
Hung Chih Chen · San Jose, US
Samuel Chu-Chiang · San Jose, US

Key dates

Filing date	Sep 8, 2008
Grant date	Jul 6, 2010
Priority date	—
Expiry date	Sep 8, 2028

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24B37/32
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

One embodiment provides a retaining ring assembly. The retaining ring assembly comprises a retaining ring configured to circumferentially surround and retain the substrate within an inner surface of the retaining ring, and a flexure coupled to the retaining ring. The flexure is configured to maintain a gap between an inner surface of a carrier ring and an outer surface of the retaining ring, and the carrier ring is circumferentially surrounding the retaining ring.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.