Method of wafer level transient sensing, threshold comparison and arc flag generation/deactivation
US7750645B2 · kind B2 · utility
7Cited by
12References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 15, 2007 |
| Grant date | Jul 6, 2010 |
| Priority date | — |
| Expiry date | Jan 19, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0206
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for processing a semiconductor wafer in a plasma reactor comprises sensing transient voltages or currents on a conductor coupled to the wafer and providing a first comparator for comparing the transient voltages or currents with a threshold level stored in the comparator. The method further includes transmitting from the comparator an arc flag signal whenever a transient voltage or current is sensed that exceeds the threshold level, and deactivating the power generator in response to the arc flag signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.