Patent · US Active

Silicon MEMS resonators

US7755367B2 · kind B2 · utility

14Cited by

1References

15Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Florian Schoen · Altdorf, DE
Markus Loehndorf · Munich, DE

Key dates

Filing date	Jun 2, 2008
Grant date	Jul 13, 2010
Priority date	—
Expiry date	Sep 20, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/02527
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.