Inventor · Altdorf, DE

Florian Schoen

18Patents
6h-index
12Co-inventors
59Inventor score

Filing activity: Jan 11, 2008 → Apr 7, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US7851925B2 Wafer level packaged MEMS integrated circuit Electricity 25 Active
US8049515B2 Silicon MEMS resonators Electricity 18 Active
US7755367B2 Silicon MEMS resonators Electricity 14 Active
US7889030B2 Passive temperature compensation of silicon MEMS devices Electricity 12 Active
US8040207B2 MEMS resonator devices with a plurality of mass elements formed thereon Electricity 6 Active
US8115573B2 Resonance frequency tunable MEMS device Electricity 6 Active
US8476990B2 MEMS resonator devices Electricity 2 Active
US7851875B2 MEMS devices and methods of manufacture thereof Emerging Cross-Sectional Technologies 1 Active
US9758369B2 Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element Electricity 1 Active
US8198690B2 MEMS devices and methods of manufacture thereof Emerging Cross-Sectional Technologies 1 Active
US8004372B2 MEMS resonator devices with a plurality of mass elements formed thereon General 0 Revoked
US9083308B2 MEMS device Electricity 0 Active
US10473683B2 Sensor element for thermal anemometry Performing Operations; Transporting 0 Active
US8049490B2 Silicon MEMS resonator devices and methods Electricity 0 Active
US8742873B2 MEMS resonator devices Electricity 0 Active
US9266719B2 Methods of manufacture MEMS devices Emerging Cross-Sectional Technologies 0 Active
US8703516B2 MEMS substrates, devices, and methods of manufacture thereof Performing Operations; Transporting 0 Active
US9035307B2 Microphone component Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.