Patent · US Active

Active wafer probe

US7759953B2 · kind B2 · utility

11Cited by

1,020References

5Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Eric W. Strid · Portland, US
K. Reed Gleason · Portland, US

Key dates

Filing date	Aug 14, 2008
Grant date	Jul 20, 2010
Priority date	—
Expiry date	Aug 14, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06772
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may include a flexible interconnection between the active circuit and a support structure. The probe may impose a relatively low capacitance on the device under test.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.