Method and apparatus for determining at least one optical property of an imaging optical system

US7760345B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Matthias Manger · Neukochen, DE
• Markus Goeppert · Aalen, DE
• Gordon Doering · Aalen, DE
• Alfred Gatzweiler · Oberkochen, DE

Key dates

• Filing date: Nov 19, 2007
• Grant date: Jul 20, 2010
• Expiry date: Nov 24, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/706
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method and an apparatus for determining at least one optical property of an imaging optical system which is designed to image an object disposed in an object plane of the optical system into an assigned image plane. The method includes disposing at least one test structure in the object plane of the optical system, disposing an image recording device in at least two different positions relative to the image plane of the optical system, in each of the at least two relative positions the image recording device being offset in relation to the image plane to such an extent that an image of the pupil of the optical system is produced respectively on the image recording device by the optical system by means of the test structure, and recording an image produced on the image recording device by the optical system by means of the test structure in each of the at least two relative positions by means of the image recording device.