System for measuring the image quality of an optical imaging system

US7760366B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Markus Mengel · Heidenheim, DE
• Ulrich Wegmann · Oberkochen, DE
• Albrecht Ehrmann · Aalen, DE
• Wolfgang Emer · Aalen, DE
• Reiner Clement · Amstetten, DE
• Ludo Mathijssen · Schwäbisch Gmünd, DE

Key dates

• Filing date: Mar 27, 2008
• Grant date: Jul 20, 2010
• Expiry date: Mar 27, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A measuring system for the optical measurement of an optical imaging system, which is provided to image a pattern arranged in an object surface of the imaging system in an image surface of the imaging system, comprises an object-side structure carrier having an object-side measuring structure, to be arranged on the object side of the imaging system; an image-side structure carrier having an image-side measuring structure, to be arranged on the image side of the imaging system; the object-side measuring structure and the image-side measuring structure being matched to each other in such a way that, when the object-side measuring structure is imaged onto the image-side measuring structure with the aid of the imaging system, a superposition pattern is produced; and a detector for the locally resolving acquisition of the superposition pattern. The imaging system is designed as an immersion system for imaging with the aid of an immersion liquid. A structure carrier to be arranged in the region of the immersion liquid is assigned a protective system in order to increase the resistance of the measuring structure to degradation caused by the immersion liquid. A measurement of immersion sys…