Patent · US Active

Graphical user interface for presenting multivariate fault contributions

US7765020B2 · kind B2 · utility

5Cited by

19References

26Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Y. Sean Lin · Irvine, US
Alexander T. Schwarm · Austin, US

Key dates

Filing date	May 4, 2007
Grant date	Jul 27, 2010
Priority date	—
Expiry date	Feb 8, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P90/80
WIPO fieldControl
WIPO sectorInstruments

Abstract

Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. The user interface presents one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis and graphically illustrates contributions to the fault associated with the multiple variables by associating a contribution of each component in the one group of components of the multiple variables to each corresponding component in the second group of components of the multiple variables.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.