Optical unit and exposure apparatus having the same
US7771065B2 · kind B2 · utility
3Cited by
10References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 12, 2006 |
| Grant date | Aug 10, 2010 |
| Priority date | — |
| Expiry date | Apr 12, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/706
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.