Filtered device container assembly with shield for a reticle
US7773198B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 19, 2007 |
| Grant date | Aug 10, 2010 |
| Priority date | — |
| Expiry date | May 10, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70866
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device container assembly (30) for storing a reticle (26) includes a device container (246) and a shield assembly (250). The device container (246) encircles the reticle (26). Further, the device container (246) includes a fluid port (254) that allows for the flow of fluid (276) into and out of the device container (246). The shield assembly (250) is encircled by the device container (246). Further, the shield assembly (250) is positioned between the fluid port (254) and the reticle (26) when the reticle (26) is positioned within the device container (246). The shield assembly (250) can inhibit contaminants (278) near the fluid port (254) from being deposited on the reticle (26) and can maintain the integrity of the reticle (26).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.