Inspection apparatus having a capacitive pressure sensor between the mounting body and the support body
US7777511B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 20, 2008 |
| Grant date | Aug 17, 2010 |
| Priority date | — |
| Expiry date | Feb 10, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus includes a movable mounting table for mounting thereon a target object, a probe card disposed above the mounting table and a control unit for controlling the mounting table. The target object is inspected by bringing a plurality of electrode pads of the target object mounted on the mounting table into contact with a plurality of probes of the probe card with a predetermined contact load by overdriving the mounting table. Further, the mounting table includes a mounting body whose temperature is controllable, a support body for supporting the mounting body, an elevation driving mechanism provided in the support body and pressure sensors provided between the mounting body and the support body to thereby detect the contact load. The control unit controls the elevation driving mechanism in accordance with detection signals from the pressure sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.