Triple valve inlet assembly
US7784496B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 11, 2007 |
| Grant date | Aug 31, 2010 |
| Priority date | — |
| Expiry date | Mar 15, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A gas delivery apparatus having a manifold block configured to create a fluid flow path, a horizontal inlet port coupled to the manifold block at a first side in fluid communication with the fluid flow path and configured to receive a supply gas, a pneumatic valve coupled to the manifold block at a first end configured to prevent unauthorized activation of fluid flow, the pneumatic valve in fluid communication with the fluid flow path and horizontal inlet port, a purge valve coupled to the manifold block in fluid communication with the fluid flow path positioned adjacent the pneumatic valve, and a vertical purge port coupled to the manifold block at a first end, the vertical purge port positioned between the purge valve and the pneumatic valve and having a purge gas input/output connection at a second end, wherein the horizontal inlet port is positioned perpendicular to the vertical purge port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.