Mark Taskar
22Patents
6h-index
10Co-inventors
62Inventor score
Filing activity: Jun 24, 2005 → Feb 2, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8322380B2 | Universal fluid flow adaptor | Emerging Cross-Sectional Technologies | 18 | Active |
| US7806143B2 | Flexible manifold for integrated gas system gas panels | Emerging Cross-Sectional Technologies | 14 | Active |
| US8794267B2 | Gas transport delay resolution for short etch recipes | Emerging Cross-Sectional Technologies | 12 | Active |
| US8122910B2 | Flexible manifold for integrated gas system gas panels | Emerging Cross-Sectional Technologies | 9 | Active |
| US8851113B2 | Shared gas panels in plasma processing systems | Emerging Cross-Sectional Technologies | 8 | Active |
| US10022689B2 | Fluid mixing hub for semiconductor processing tool | Performing Operations; Transporting | 6 | Active |
| US8202393B2 | Alternate gas delivery and evacuation system for plasma processing apparatuses | Electricity | 5 | Active |
| US9090972B2 | Gas supply systems for substrate processing chambers and methods therefor | Emerging Cross-Sectional Technologies | 4 | Active |
| US7784496B2 | Triple valve inlet assembly | Emerging Cross-Sectional Technologies | 3 | Active |
| US10128087B2 | Configuration independent gas delivery system | Emerging Cross-Sectional Technologies | 3 | Active |
| US10943769B2 | Gas distributor and flow verifier | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US9335768B2 | Cluster mass flow devices and multi-line mass flow devices incorporating the same | Emerging Cross-Sectional Technologies | 3 | Active |
| US10431431B2 | Gas supply delivery arrangement including a gas splitter for tunable gas flow control | Electricity | 3 | Active |
| US10002747B2 | Methods and apparatus for supplying process gas in a plasma processing system | Electricity | 2 | Active |
| US9091397B2 | Shared gas panels in plasma processing chambers employing multi-zone gas feeds | Emerging Cross-Sectional Technologies | 2 | Active |
| US9721763B2 | Systems and methods for providing gases to a process chamber | Emerging Cross-Sectional Technologies | 2 | Active |
| US7628168B2 | Optimized activation prevention assembly for a gas delivery system and methods therefor | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8720478B2 | Optimized activation prevention mechanism for a gas delivery system | Emerging Cross-Sectional Technologies | 1 | Active |
| US11532460B2 | Gas mixer | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US9704761B2 | Corrosion sensor retainer assembly apparatus and method for detecting corrosion | Electricity | 0 | Active |
| US9175808B2 | System and method for decreasing scrubber exhaust from gas delivery panels | Emerging Cross-Sectional Technologies | 0 | Active |
| US8104503B2 | Optimized activation prevention mechanism for a gas delivery system and methods therefor | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.