Inventor · San Mateo, CA, US

Mark Taskar

22Patents
6h-index
10Co-inventors
62Inventor score

Filing activity: Jun 24, 2005 → Feb 2, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8322380B2 Universal fluid flow adaptor Emerging Cross-Sectional Technologies 18 Active
US7806143B2 Flexible manifold for integrated gas system gas panels Emerging Cross-Sectional Technologies 14 Active
US8794267B2 Gas transport delay resolution for short etch recipes Emerging Cross-Sectional Technologies 12 Active
US8122910B2 Flexible manifold for integrated gas system gas panels Emerging Cross-Sectional Technologies 9 Active
US8851113B2 Shared gas panels in plasma processing systems Emerging Cross-Sectional Technologies 8 Active
US10022689B2 Fluid mixing hub for semiconductor processing tool Performing Operations; Transporting 6 Active
US8202393B2 Alternate gas delivery and evacuation system for plasma processing apparatuses Electricity 5 Active
US9090972B2 Gas supply systems for substrate processing chambers and methods therefor Emerging Cross-Sectional Technologies 4 Active
US7784496B2 Triple valve inlet assembly Emerging Cross-Sectional Technologies 3 Active
US10128087B2 Configuration independent gas delivery system Emerging Cross-Sectional Technologies 3 Active
US10943769B2 Gas distributor and flow verifier Mechanical Engineering; Lighting; Heating 3 Active
US9335768B2 Cluster mass flow devices and multi-line mass flow devices incorporating the same Emerging Cross-Sectional Technologies 3 Active
US10431431B2 Gas supply delivery arrangement including a gas splitter for tunable gas flow control Electricity 3 Active
US10002747B2 Methods and apparatus for supplying process gas in a plasma processing system Electricity 2 Active
US9091397B2 Shared gas panels in plasma processing chambers employing multi-zone gas feeds Emerging Cross-Sectional Technologies 2 Active
US9721763B2 Systems and methods for providing gases to a process chamber Emerging Cross-Sectional Technologies 2 Active
US7628168B2 Optimized activation prevention assembly for a gas delivery system and methods therefor Emerging Cross-Sectional Technologies 1 Expired
US8720478B2 Optimized activation prevention mechanism for a gas delivery system Emerging Cross-Sectional Technologies 1 Active
US11532460B2 Gas mixer Mechanical Engineering; Lighting; Heating 0 Active
US9704761B2 Corrosion sensor retainer assembly apparatus and method for detecting corrosion Electricity 0 Active
US9175808B2 System and method for decreasing scrubber exhaust from gas delivery panels Emerging Cross-Sectional Technologies 0 Active
US8104503B2 Optimized activation prevention mechanism for a gas delivery system and methods therefor Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.