External extraction light emitting diode based upon crystallographic faceted surfaces
US7791061B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2006 |
| Grant date | Sep 7, 2010 |
| Priority date | — |
| Expiry date | Jul 21, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/84
Abstract
A light emitting diode is disclosed that includes a support structure and a Group III nitride light emitting active structure mesa on the support structure. The mesa has its sidewalls along an indexed crystal plane of the Group III nitride. A method of forming the diode is also disclosed that includes the steps of removing a substrate from a Group III nitride light emitting structure that includes a sub-mount structure on the Group III nitride light emitting structure opposite the substrate, and thereafter etching the surface of the Group III nitride from which the substrate has been removed with an anisotropic etch to develop crystal facets on the surface in which the facets are along an index plane of the Group III nitride. The method can also include etching the light emitting structure with an anisotropic etch to form a mesa with edges along an index plane of the Group III nitride.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.