Inspection apparatus
US7791362B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 12, 2008 |
| Grant date | Sep 7, 2010 |
| Priority date | — |
| Expiry date | Mar 11, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/44
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus includes a movable mounting table having a temperature control device, an elevation drive unit for vertically moving the mounting table, a controller for controlling the elevation drive unit and a probe card having probes arranged above the mounting table. The elevation drive unit includes first and second driving shafts connected to each other through coupling members to drive the mounting table, a motor for driving the first and second driving shafts, and a torque detection unit for detecting a torque between the first and second driving shafts based on a contact load between the probes and the at least one device. The controller includes a torque controller for controlling the torque based on detection results of the torque detection unit when the probe card expands or contracts due to temperature variation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.