System for measuring the image quality of an optical imaging system

US7796274B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Markus Mengel · Heidenheim, DE
• Ulrich Wegmann · Oberkochen, DE
• Albrecht Ehrmann · Aalen, DE
• Wolfgang Emer · Aalen, DE
• Reiner Clement · Amstetten, DE
• Ludo Mathussen · Schwäbisch Gmünd, DE

Key dates

• Filing date: Jun 2, 2005
• Grant date: Sep 14, 2010
• Expiry date: Dec 2, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A measuring system (100) for the optical measurement of an optical imaging system (150), which is provided to image a pattern arranged in an object surface (155) of the imaging system in an image surface (156) of the imaging system, comprises an object-side structure carrier (110) having an object-side measuring structure (111), to be arranged on the object side of the imaging system; an image-side structure carrier (120) having an image-side measuring structure (121), to be arranged on the image side of the imaging system; the object-side measuring structure and the image-side measuring structure being matched to each other in such a way that, when the object-side measuring structure is imaged onto the image-side measuring structure with the aid of the imaging system, a superposition pattern is produced; and a detector (130) for the locally resolving acquisition of the superposition pattern. The imaging system is designed as an immersion system for imaging with the aid of an immersion liquid (171). A structure carrier to be arranged in the region of the immersion liquid is assigned a protective system (125) in order to increase the resistance of the measuring structure to degradat…