Multi-function module for an electron beam column

US7800075B2 · kind B2 · utility

Inventors

• Benyamin Buller · Cupertino, US
• William J. DeVore · Hayward, US
• Juergen Frosien · Ottobrunn, DE
• Xinrong Jiang · Palo Alto, US
• Richard L. Lozes · Pleasanton, US
• Henry Pearce-Percy · Los Gatos, US
• Dieter Winkler · Munich, DE
• Steven Thomas Coyle · Alameda, US
• Helmut Banzhof · Poing, DE

Key dates

• Filing date: Aug 19, 2008
• Grant date: Sep 21, 2010
• Expiry date: Jan 26, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/31754
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.