Z-stage with dynamically driven stage mirror and chuck assembly
US7800735B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2006 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Sep 17, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/27
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Substrate support apparatus and methods are described. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.