Echelle spectometer with improved use of the detector by means of two spectrometer arrangements

US7804593B2 · kind B2 · utility

Assignee

• Leibniz-Institut Für Analytische Wissenschaften-ISAS-e.V. · DE

Inventors

• Helmut Becker-Roβ · Berlin, DE
• Stefan Florek · Berlin, DE
• Günter Wesemann · Berlin, DE
• Michael Okruss · Potsdam, DE

Key dates

• Filing date: Jun 2, 2005
• Grant date: Sep 28, 2010
• Expiry date: Mar 9, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J3/2803
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a spectrometer arrangement (10) comprising a spectrometer (14) for producing a spectrum of a first wavelength range of radiation from a radiation source on a detector (42). Said arrangement also comprises: an Echelle grating (36) for the spectral decomposition of the radiation penetrating the spectrometer arrangement (10) in a main dispersion direction (46); a dispersing element (34) for separating the degrees by means of spectral decomposition of the radiation in a transversal dispersion direction (48) which forms an angle with the main dispersion direction of the Echelle grating (36), in such a way that a two-dimensional spectrum (50) can be produced with a plurality of separated degrees (52); an imaging optical element (24, 38) for imaging the radiation penetrating through an inlet gap (20) into the spectrometer arrangement (10), in an image plane (40); and a surface detector (42) comprising a two dimensional arrangement of a plurality of detector elements in the image plane (40). The inventive arrangement is characterized in that another spectrometer (12) comprising at least one other dispersing element (64) and another imaging optical element (60,66) i…