Flexible manifold for integrated gas system gas panels
US7806143B2 · kind B2 · utility
14Cited by
15References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 11, 2007 |
| Grant date | Oct 5, 2010 |
| Priority date | — |
| Expiry date | Apr 20, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.