Patent · US Active

Interferometric measurement of DLC layer on magnetic head

US7808652B2 · kind B2 · utility

1Cited by

2References

21Claims

0Family size

Assignee

Veeco Instruments Inc. · US

Inventors

Florin Munteanu · Tucson, US
Dong Chen · Beijing, CN
Erik Novak · Tucson, US
G. Lawrence Best · Tucson, US

Key dates

Filing date	Jan 18, 2008
Grant date	Oct 5, 2010
Priority date	—
Expiry date	Nov 13, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/0625
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An explicit relationship is developed between the ratio of average interferometric modulation produced by diamond-like carbon (DLC)-coated magnetic-head surfaces and the thickness of the DLC layer. Accordingly, the thickness of the DLC layer is calculated in various manners from modulation data acquired for the system using object surfaces of known optical parameters.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.