Patent · US Expired

Method and device for generating EUV radiation and/or soft X-ray radiation

US7809112B2 · kind B2 · utility

1Cited by

1References

30Claims

0Family size

Assignee

KONINKLIJKE PHILIPS ELECTRONICS NV · NL

Inventors

Gunther Hans Derra · Aachen, DE
Rolf Theo Anton Apetz · Aachen, DE
Willi Neff · Kelmis, BE
Oliver Rosier · Jüchen, DE
Peter Zink · Aachen, DE

Key dates

Filing date	Dec 13, 2004
Grant date	Oct 5, 2010
Priority date	—
Expiry date	Mar 28, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70916
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method of generating in particular EUV radiation (12) and/or soft X-ray radiation (12a) emitted by a plasma (26) is described. The plasma (26) is formed by an operating gas (22) in a discharge space (14) which comprises at least one radiation emission window (16) and an electrode system with at least one anode (18) and at least one cathode (20). This electrode system transmits electrical energy to the plasma (26) by means of charge carriers (24) introduced into the discharge space (14). It is suggested for obtaining a reliable ignition of the plasma (26) at high repetition frequencies that a radiation (30) generated by at least one radiation source (28) is introduced into the discharge space (14) for making available the discharge carriers (24).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.