High throughput servo load cup with integrated wet chemistry delivery
US7811153B1 · kind B1 · utility
6Cited by
9References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2007 |
| Grant date | Oct 12, 2010 |
| Priority date | — |
| Expiry date | May 6, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67748
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A work piece handling apparatus moves workpieces with a plurality of independently movable load cups that have combined multiple axes of motion. The apparatus can load and unload work pieces from a wet process station and move work pieces between wet process stations and maintain wet chemistry delivery to the workpiece without involving a robot. A method of work piece handling using the apparatus provides a significant throughput improvement by reducing the inherent time lag of pneumatic systems and eliminating multiple steps involving the robot during inter-station wafer transfer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.