Positive-working photoimageable bottom antireflective coating
US7824837B2 · kind B2 · utility
45Cited by
56References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2007 |
| Grant date | Nov 2, 2010 |
| Priority date | — |
| Expiry date | Oct 22, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/952
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a positive bottom photoimageable antireflective coating composition which is capable of being developed in an aqueous alkaline developer, wherein the antireflective coating composition comprises a polymer comprising at least one recurring unit with a chromophore group and one recurring unit with a hydroxyl and/or a carboxyl group, a vinyl ether terminated crosslinking agent, and optionally, a photoacid generator and/or an acid and/or a thermal acid generator. The invention further relates to a process for using such a composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.