Graphical user interface for presenting multivariate fault contributions
US7831326B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2007 |
| Grant date | Nov 9, 2010 |
| Priority date | — |
| Expiry date | Feb 23, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/80
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Recipe steps of a manufacturing process run that generated a fault are displayed in a current view of a user interface, the recipe steps being displayed in association with a first axis. At least one of measured parameters or calculated parameters of the manufacturing process run are displayed in the current view, where at least one of the measured parameters and the calculated parameters are displayed in association with a second axis. A plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters are displayed in the current view, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.