Patent · US Active

Charged particle detector assembly, charged particle beam apparatus and method for generating an image

US7842930B2 · kind B2 · utility

1Cited by

4References

22Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Gilad Almogy · Givatayim, IL
Dror Shemesh · Hod HaSharon, IL
Pavel Adamec · Haar, DE

Key dates

Filing date	Oct 24, 2007
Grant date	Nov 30, 2010
Priority date	—
Expiry date	Feb 17, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2804
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.