Method of plasma particle simulation, storage medium, plasma particle simulator and plasma processing apparatus
US7847247B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 26, 2008 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Feb 17, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of plasma particle simulation capable of preventing solution divergence. A space within a housing chamber of a plasma processing apparatus is divided into a plurality of cells. A weighting factor corresponding to the number of plasma particles represented by a superparticle is set in each of the divided cells. Superparticles are set in each of the divided cells using plasma particles contained in the divided cell and the set weighting factor. The behavior of the superparticles in each of the divided cells is calculated. The weighting factor becomes smaller as the divided cell is located closer to a solid wall surface of the housing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.