Scanning electron microscope having multiple detectors and a method for multiple detector based imaging
US7847267B2 · kind B2 · utility
3Cited by
43References
16Claims
0Family size
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Key dates
| Filing date | Oct 22, 2003 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | May 19, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.